Morgan is your substrate damp? I use a hovabator, just dampen the vermiculite before eggs go in, to the point I can kind of mold it together if I squeeze the vermic, but not driping.
Then I leave it alone until or unless I feel that it has dried, then I just drip a few drops of water with an eyedropper a near the eggs.
Sometimes no matter what ya do they dimple or cave in, if the substrate is damp they should be okay if they are fertile.
* Are ya sure they did not get TOO damp, when you raised humidity? Remember if they turn real browish/yellowy you may have it too wet, if they cave they may be too dry!
Just continue to monitor them, is all I can say! I also put a large plastic lid from a peanut butter jar in the hovabator filled with water beside my egg containers. If I have no room (too many containers) I put the lid of water under the screen and pur water in it as it needs it.
How are your temps ?
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PHEve / Eve
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