If the substrate isn't moist enough they could just be dryed out a bit and the humidity in your incubation medium should plump them back up. otherwise it is possible that they are infertile and are already starting to collapse.

Have you tried to candle them yet? If not use a small penlite flashlight like a mini-mag and shine it through the egg. If the egg glows pinkish then it should be fertile. If it glows yellow it may not be but neither is a positive!
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Marcia - FroggieB Dragons
www.froggieb.com/MHDHome.html